Senior Metrology Process Engineer

Responsibilities

Metrology Development and Optimization

• Serve as the process owner for semiconductor metrology, developing, sustaining, and optimizing measurement methods for production and process development.
• Develop and optimize measurement recipes for ellipsometry, spectroscopy, reflectometry, profilometry, WLI, Nanospec, and other metrology systems.
• Develop measurement methods for film thickness, RI, surface topography, step height, feature dimensions, wafer bow, and other critical process parameters.
• Establish appropriate measurement locations, sampling plans, and measurement strategies to ensure accurate and representative process data.
• Apply SPC, DOE, and statistical analysis to monitor and improve measurement and manufacturing processes.
• Work cross-functionally with photo, etch, thin films, wet process, integration, R&D, and production teams to develop measurement solutions and troubleshoot process issues.

Equipment Ownership and Troubleshooting

• Serve as the technical owner for ellipsometry, spectroscopy, reflectometry, profilometry, WLI, Nanospec, and associated metrology equipment.
• Lead troubleshooting efforts for measurement excursions, equipment issues, recipe problems, and measurement correlation.
• Support equipment qualification, calibration, preventive maintenance, tool matching, and continuous improvement activities.
• Develop and maintain tool-to-tool correlation and matching strategies across metrology systems.
• Work with equipment vendors and maintenance personnel to improve measurement performance, reliability, and uptime.
• Support evaluation, selection, installation, and qualification of new metrology equipment.

Measurement System Analysis and Process Control

• Develop and execute MSA and Gage R&R studies to evaluate measurement repeatability, reproducibility, accuracy, and capability.
• Evaluate tool-to-tool correlation, operator effects, measurement sensitivity, sampling strategies, and other sources of measurement variation.
• Establish measurement specifications, control limits, and monitoring methods.
• Ensure measurement systems are capable of supporting process specifications, SPC, process capability analysis, and manufacturing requirements.
• Identify and reduce sources of measurement variation to improve confidence in manufacturing data.

Automation, Recipe Management, and Data Systems

• Support automated recipe download and verification for production metrology equipment.
• Work with automation and equipment teams to ensure correct recipe selection, parameter control, lot/wafer tracking, and data collection.
• Develop and maintain measurement limits, alarms, and fault detection rules.
• Review equipment and measurement data to identify trends, excursions, and early indicators of process or equipment issues.
• Support automated data collection, reporting, traceability, and integration with MES and manufacturing systems.

Yield Improvement and Manufacturing Support

• Use metrology data to support root cause investigations, process characterization, yield improvement, and defect reduction.
• Develop and implement improvements to increase measurement capability, reduce variation, and improve manufacturing control.
• Support new product introductions, process qualifications, and technology transfers.
• Develop and maintain measurement procedures, work instructions, specifications, control plans, and MSA documentation.
• Train technicians and junior engineers on metrology equipment, measurement methods, troubleshooting, and best practices.

Education & Experience

• Bachelor’s or Master’s degree in Materials Science, Electrical Engineering, Chemical Engineering, Physics, or a related technical field.
• 5+ years of semiconductor metrology, process engineering, or related semiconductor manufacturing experience.
• Experience developing, sustaining, and optimizing metrology processes in a semiconductor manufacturing environment.
• Experience supporting production, process development, equipment qualifications, and new product introductions.
• Ability to work on-site in a semiconductor manufacturing and cleanroom environment.

• Ability to provide off-hours support as needed for critical manufacturing or equipment issues.

Skills

• Strong hands-on experience with thin-film and dimensional metrology, including:
  • Ellipsometry
  • Spectroscopy
  • Reflectometry
  • Profilometry
  • WLI
  • Nanospec
• Strong understanding of film thickness, RI, uniformity, surface topography, step height, and feature dimension measurements.
• Experience developing and optimizing measurement recipes, methods, and sampling strategies.
• Experience with MSA, Gage R&R, tool matching, measurement correlation, and measurement system capability.
• Strong background in SPC, DOE, process capability, statistical analysis, and root cause analysis.
• Proficient with JMP, Excel, and other data analysis tools.
• Experience analyzing manufacturing data and developing automated reports and process monitoring methods.
• Strong analytical, troubleshooting, documentation, and communication skills.

Preferred

• Direct GaAs and/or InP semiconductor manufacturing experience.
• Experience with high-volume semiconductor manufacturing.
• Experience with additional metrology technologies including CD-SEM, AFM, four-point probe, Surfscan, overlay, and automated defect inspection.
• Experience with MES, automated recipe management, SECS/GEM, FDC, or other semiconductor manufacturing automation systems.
• Experience with SQL, JMP scripting, Excel automation, Python, or similar tools for automated data analysis and reporting.
• Familiarity with device-level impacts of measurement results and semiconductor process integration.

Working Conditions

• Will be exposed to areas where hand tools and power tools are being operated
• Will be exposed to areas where hazardous chemicals or gases are stored

• Ability to work in a cleanroom environment per semi-conductor protocol/requirements

Physical Requirements

• Work in a class 100/1000 clean room for extended periods
• Wear full cleanroom attire (smock, mask, etc.)
• Work with and/or around chemicals (such as solids and acids)
• Stand for up to 4 hours at a time
• Lift up to 16-30 Pounds
• Push/Pull up to 16-30 pounds

• Sit for up to 4 hours at a time

Safety Requirements

All employees are required to follow the site EHS procedures and Coherent Corp. Corporate EHS standards.

Quality and Environmental Responsibilities

Depending on location, this position may be responsible for the execution and maintenance of the ISO 9000, 9001, 14001 and/or other applicable standards that may apply to the relevant roles and responsibilities within the Quality Management System and Environmental Management System.

Culture Commitment

Ensure adherence to company’s values (ICARE) in all aspects of your position at Coherent Corp.:

Integrity - Create an Environment of Trust

Collaboration - Innovate Through the Sharing of Ideas

Accountability - Own the Process and the Outcome

Respect - Recognize the Value in Everyone

Enthusiasm - Find a Sense of Purpose in Work

Coherent Corp. is an equal opportunity/affirmative action employer. All qualified applicants will receive consideration for employment without regard to sex, gender identity, sexual orientation, race, color, religion, national origin, disability, protected Veteran status, age, or any other characteristic protected by law.

If you need assistance or an accommodation due to a disability, you may contact us at [email protected].