Physics | Optical Engineering internship: next-generation focus sensor

Introduction

At ASML’s YieldStar XYZ Wafer Align group in Veldhoven, you will join a team that develops advanced metrology solutions for semiconductor manufacturing. This internship focuses on improving the understanding of a next-generation focus sensor that supports highly accurate wafer measurements. Your work will help characterize how optical and wafer-related parameters influence sensor performance. By combining physical insight with modeling and simulation, you will contribute to technology that supports future semiconductor innovations. This internship offers the opportunity to work closely with experienced specialists in a collaborative and research-driven environment.

Your assignment

During this Physics | Optical Engineering internship, you will investigate the operating principles and behavior of a next-generation focus sensor. You will develop analytical and numerical models, compare simulation results with experimental observations, and help build a deeper understanding of the factors that influence sensor performance. You will work with technical experts from different disciplines while contributing to research that supports future metrology developments. Your main responsibilities will be:

• Develop simplified optical models to predict focus sensor behavior.
• Extend analytical ray-based and irradiance-based models.
• Create Fourier optics simulations and compare results with analytical predictions.
• Build a structured simulation and data-processing workflow.
• Analyze the impact of optical and wafer-related parameter variations.
• Identify key performance sensitivities and translate them into simplified models.
• Compare model outcomes with experimental observations and present findings.

This is a master or bachelor thesis internship for minimum 5 months, minimum 4 days per week (3 days on-site). The start date of this internship is as of February 2027.

Your profile

To be suitable for the internship, you:

• Are pursuing a master’s or bachelor degree in physics, optical engineering, photonics, or a related field.
• Have knowledge of optical systems and Fourier analysis.
• Have programming experience with Python, MATLAB, Mathematica, or comparable scientific computing tools.
• Are analytical and enjoy translating physical principles into practical models.
• Are able to communicate clearly and collaboratively in English.

This Physics | Optical Engineering internship is ideal if you are excited by optics, simulation, and semiconductor technology. You will have the opportunity to deepen your technical expertise, collaborate with specialists, and contribute to research that supports the development of next-generation metrology systems at ASML. Through this internship, you will gain hands-on experience in an innovative environment while working on a challenge with direct relevance to future semiconductor manufacturing.

This position requires access to controlled technology, as defined in the United States Export Administration Regulations (15 C.F.R. § 730, et seq.). Qualified candidates must be legally authorized to access such controlled technology prior to beginning work. Business demands may require ASML to proceed with candidates who are immediately eligible to access controlled technology.

Inclusion and diversity

ASML is an Equal Opportunity Employer that values and respects the importance of a diverse and inclusive workforce. It is the policy of the company to recruit, hire, train and promote persons in all job titles without regard to race, color, religion, sex, age, national origin, veteran status, disability, sexual orientation, or gender identity. We recognize that inclusion and diversity is a driving force in the success of our company.

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