How much does ASML pay?
As of Oct 3, 2026, 37 of the 270 open jobs ASML has on Alion state a salary. The median is $150k a year, and the middle half pays $119k to $181k. The best-paid open role is Principle Software Engineer – Systems software at $278k.
ASML pay by level
| Level | Jobs | Median | Typical range |
|---|---|---|---|
| Senior | 16 | $150k | $122k – $162k |
| Lead | 10 | $162k | $134k – $199k |
| Junior | 4 | $85k | $60k – $111k |
ASML pay by role
| Role | Jobs | Median | Typical range |
|---|---|---|---|
| Industrial Engineering | 13 | $150k | $85k – $199k |
| DevOps | 4 | $150k | $111k – $158k |
| Operations | 4 | $122k | $122k |
| Management | 4 | $115k | $85k – $134k |
| Backend | 3 | $252k | $181k – $252k |
ASML pay by city
| Location | Jobs | Median | Typical range |
|---|---|---|---|
| San Diego | 18 | $150k | $136k – $196k |
| Veldhoven | 6 | $73k | $60k – $85k |
| San Jose | 4 | $164k | $134k – $252k |
ASML pay by work format
| Work format | Jobs | Median | Typical range |
|---|---|---|---|
| In office | 28 | $138k | $115k – $162k |
| Hybrid | 9 | $158k | $134k – $196k |
How pay at ASML is spread
37 of 269 vacancies state a salary (14%). The range below is built from those 37 stated figures only, never from an estimate.
Best-paid open roles at ASML
| Principle Software Engineer – Systems softwareStaff+ | $278k |
| Sr. Software EngineerSenior | $252k |
| Principal Mechanical EngineerLead | $221k |
| Principal Engineer, Thermal & Fluids SystemsLead | $221k |
| Senior Customer Technology ManagerLead | $200k |
| Project Lead - DUV Laser OpticsLead | $199k |
| Staff Laser ScientistStaff+ | $199k |
| Source Research Project LeadLead | $199k |
| Senior Controls/Automation EngineerSenior | $196k |
| Senior software application engineerSenior | $181k |
Questions about pay at ASML
What is the average salary at ASML?
The median salary stated in ASML job postings is $150k a year, across 37 open jobs with pay; the middle half pays $119k to $181k.
How much does ASML pay for Industrial Engineering roles?
Industrial Engineering roles at ASML state a median of $150k a year (13 postings with pay, middle half $85k – $199k).
How much does ASML pay for DevOps roles?
DevOps roles at ASML state a median of $150k a year (4 postings with pay, middle half $111k – $158k).
How much does ASML pay for Operations roles?
Operations roles at ASML state a median of $122k a year (4 postings with pay, middle half $122k).
How much does ASML pay in San Diego?
Jobs at ASML in San Diego state a median of $150k a year (18 postings with pay).
What is the highest-paying open job at ASML?
Right now it is Principle Software Engineer – Systems software at ASML, with a stated $278k a year.
Does ASML publish salaries in its job postings?
14% of the open jobs ASML has on Alion state a salary: 37 of 270.
How to cite this page
Only pay an employer wrote in its own job advert is used, converted to US dollars a year; estimates are never mixed in. The figures are rebuilt twice a day from the vacancies open now.
These figures are published under a free licence. You may reuse them, including commercially, as long as you credit Alion and link back to this page.
ASML salaries: median $150k across 37 job postings with pay. Alion, Oct 3, 2026, https://alion.io/company/asml/salaries